: : : : : : : : : : Super OTP Dvice III : : : : : : : : : :



Metallogarphic microscope coaxial Unit
SOD-III Series (for mounting a machine)
* Compact design.
* Compatible with various makers' bright field lenses
* Mount in many different ways such as horizontal setting.

* Fiber end inspection.
* Liquid cystal defective inspection and aligment.
* Wafer defective inspection and alignment.

OLYMPUS   MITSUTOYO   NIKON
Product name
NA
WD(mm)
Product name
NA
WD(mm)
Product name
NA
WD(mm)
M Splan 1.5X
0.04
2
 M Splan Apo 1X
0.025
11
 CF IC EPI Plan 1.5X
0.045
3.6
M Splan 2.5X
0.07
5
 M Splan Apo 2X
0.055
34
 CF IC EPI Plan 2.5X
0.075
8.8
M Splan 5X
0.13
21.1
 M Splan Apo 5X
0.14
34
 CF IC EPI Plan 5X
0.13
22.5
M Splan 10X
0.3
9
 M Splan Apo 10X
0.28
33.5
 CF IC EPI SLWDPlan 10X
0.21
20.3
ULWDMSplan 20X
0.4
11
 M Splan Apo SL 20X
0.28
30.5
 CF IC EPI SLWDPlan 20X
0.35
20.5
ULWDMSplan 50X
0.55
8.1
 M Splan Apo SL 50X
0.42
20.5
 CF IC EPI SLWDPlan 50X
0.45
13.8
ULWDMSplan 80X
0.75
4.1
 M Splan Apo SL 80X
0.5
15
 CF IC EPI SLWDPlan 100X
0.73
4.7
ULWDMSplan 100X
0.8
3.18
 M Splan Apo SL 100X
0.55
13